Thomas Research Group

Chemical Etching of Porous Silicon

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Porous silicon resarch logo.Silicon, when anodized electrochemically or chemically in an HF-containing electrolyte, is etched in a manner which produces a sponge-like porous layer of silicon with pore dimensions that range from several microns in width to only a few nanometers. As well, a thin amorphous layer coats the walls in which are embedded small Si crystallites, a few nanometers in diameter. Though porous silicon (poSi) had been studied since the mid-1950's, it was only during the past decade that a tremendous research activity was pursued following the observation of its remarkable room temperature luminescence. The interpretation of this phenomenon in terms of quantum confinement spurred scientific interest while the potential for significant applications in flat panel display technology and possibly in optoelectronics energized its technological development. Porous silicon's fortune swelled and receded many times as conflicting reports and opposing theories passed into the literature. The model which enjoys the broadest support focuses on the idea of a quantum confined nanostructure which is strongly influenced by the presence of radiative and non-radiative defect sites on its surface. However, a solid body of convincing evidence has been presented in support of a purely defect model as the origin of these optical phenomena. While early defect models considered the role of polymeric SiHx and Si(OH)x, the competing theory now expounds the role played by an oxygen defect site, common to the Si/SiO2 interface, called a non-bridging oxygen hole centre (NBOHC). In spite of this tremendous research activity, the definitive experiment, to correlate spectral emission properties with emission site (a quantum confined silicon dot or some interfacial site) still remains to be done.

Hillock structure of porous silicon.Our work, over the past four years, has been in support of the quantum confinement model. We have principally worked with the chemical etching system (HNO3 and HF) rather than the more common electrochemical system and have drawn attention to the chaotic behaviour of the kinetics and the hillock structure (see SFM image to the left; the image size is 20 x 20 µm) which is unique to the chemical system. Of central importance is a series of experiments involving the photoinduced chemical etching of porous silicon. We have shown how the chemical reaction can be controlled by light and that the frequency of the incident light affects the final emission characteristics. By etching while irradiating the sample with light of a shorter wavelength, the resulting material photoluminesces also at a shorter wavelength. These ideas support the quantum model since the photogeneration of holes inside a quantum dot is dependent upon the local bandgap. As the particle becomes smaller as a result of the etching process, the bandgap widens until absorption no longer occurs and the reaction stops. Shorter wavelength light (higher energy) will continue to be absorbed until the particle is even smaller (larger bandgap). Such a smaller particle will also tend to photoluminesce at shorter wavelength, since the bandgap is wider.

 Photochemically etched porous silicon.Another aspect of this work is found in the epi-fluorescence microscope images of the regions irradiated by the laser to induce the photoetching process (the image on the right is about 200 µm across at the bottom). The vast majority of poSi material is produced electrochemically and so the chaotic kinetics of the chemical system are not commonly observed. However, we have found that the chemical system gives rise to spatial variations in the etching conditions so that there are spatially separated regions which emit different colors of lights. The overall spectrum is similar in width to those observed traditionally, but it is clear that this is actually made up from a distribution of emitters. While in electrochemically etched material these emitters are uniformly distributed across the material, in the chemical etching system they can be locally less dispersed, so that regions which emit yellow are separate from those which emit orange or red. Presumably, this suggests that the quantum emitters in the yellow region are monodisperse in size and are smaller than those in the orange or red emitting regions. This pre-sorting of particle size by the chemical reaction provides us with a unique opportunity to try to answer the important poSi question regarding the correlation of emitter size with emission wavelength.

We are working to convert our scanning probe microscopes (SPM: we have one from Burleigh Instruments and another from Topometrix) so that they can function as scanning near-field optical microscopes (SNOM) but operate specifically in a fluorescence collection mode. In this manner, the light can be collected from a 50 nm region and directed into a spectrometer to acquire the spectrum. We expect that the spectrum will be much narrower than the complete spectrum from the entire sample. Another possibility modifies this new probe even further by taking the probe tip and coating with a transparent conductor, such as In2O3. Now this probe tip can function as an scanning tunneling microscope (STM) tip. While an STM image can be acquired in normal fashion (others have shown that one can still obtain atomic resolution in this manner), a short voltage spike on the tip can inject a burst of high energy electrons into a particular object. Since this can induce electroluminescence, the probe tip can pick up the emitted fluorescence and acquire the spectrum. We hope that this may prove to be the critical experiment to correlate size with emission wavelength.


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